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Bao, Min-Hang

Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes / Min-Hang Bao. - xiv, 378 pages : illustrations ; 25 cm. - Handbook of Sensor and Actuators ; 8 .

Includes bibliographical references and index.

Contents Preface Contents Ch. 1 Introduction to micro mechanical transducers Ch. 2 Basic mechanics of beam and diaphragm structures Ch. 3 Air damping Ch. 4 Electrostatic driving and capacitive sensing Ch. 5 Piezoresistive sensing Ch. 6 Piezoresistive pressure transducers Ch. 7 Piezoresistive accelerometers Ch. 8 Capacitive pressure transducers and accelerometers Ch. 9 Resonant senors and vibratory gyroscopes Subject index

ISBN: 044450558X

Subjects--Topical Terms:
Transducers--Handbooks, manuals, etc.
Microelectromechanical systems--Handbooks, manuals, etc.

LC Class. No.: TJ223.T75 / B36 2004