-baunlogo.png?alt=media&token=2b1f50b7-298a-48ee-a2b1-6fcf8e70b387)
Principles of lithography /
Levinson, Harry J.
Principles of lithography / Harry J. Levinson. - 3rd ed. - xiv, 503 pages : illustrations (some color) ; 26 cm. - Press monograph ; 198 .
Includes bibliographical references and index.
9780819483249
2010026775
Integrated circuits--Design and construction.
Microlithography.
TK7874 / .L397 2010
Principles of lithography / Harry J. Levinson. - 3rd ed. - xiv, 503 pages : illustrations (some color) ; 26 cm. - Press monograph ; 198 .
Includes bibliographical references and index.
9780819483249
2010026775
Integrated circuits--Design and construction.
Microlithography.
TK7874 / .L397 2010
-Facebook-2024.png?alt=media&token=2fcc0655-0091-431c-8ee0-059464d6eda1){kind=small}
-Instagram-2024.png?alt=media&token=a143a92a-6f9d-45a7-9ba2-9cc62f92e772){kind=small}