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Modern GaAs processing methods /

Williams, Ralph E.

Modern GaAs processing methods / Ralph Williams. - xv, 437 pages : illustrations ; 24 cm. - The Artech House microwave library . - Artech House microwave library. .

Includes bibliographical references and index.

Table Of Contents:Preface Acknowledgements Part I Preliminary Concepts Part II General Process Techniques Part III Specific Process Steps Part IV Characterization and Measurement Appendix I Manufacturing Disciplines Index The Author

ISBN: 0890063435

LCCN: 90001253

Subjects--Topical Terms:
Gallium arsenide semiconductors.

LC Class. No.: TK7871.15.G3 / W56 1990

Dewey Class. No.:

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