TY  - BOOK
AU  - Ohring,Milton
TI  - Materials science of thin film deposition and structure
SN  - 0585470979
AV  - TA418.9.T45 O47 2002
PY  - 2002///
CY  - San Diego
PB  - Academic
KW  - Thin films
UR  - http://www.netlibrary.com/urlapi.asp?action=summary&v=1&bookid=92177
ER  -