TY  - BOOK
AU  - Bao,Min-Hang
TI  - Micro mechanical transducers: pressure sensors, accelerometers, and gyroscopes 
T2  - Handbook of Sensor and Actuators
SN  - 044450558X
AV  - TJ223.T75 B36 2004
PY  - 2004///
CY  - Amsterdam
PB  - Elsevier
KW  - Transducers
KW  - Handbooks, manuals, etc
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; Contents; Preface; Contents; Ch. 1	Introduction to micro mechanical transducers; Ch. 2	Basic mechanics of beam and diaphragm structures; Ch. 3	Air damping; Ch. 4	Electrostatic driving and capacitive sensing; Ch. 5	Piezoresistive sensing; Ch. 6	Piezoresistive pressure transducers; Ch. 7	Piezoresistive accelerometers; Ch. 8	Capacitive pressure transducers and accelerometers; Ch. 9	Resonant senors and vibratory gyroscopes; Subject index
ER  -