TY  - BOOK
AU  - Levinson,Harry J.
TI  - Principles of lithography
T2  - Press monograph
SN  - 9780819483249
AV  - TK7874 .L397 2010
PY  - 2010///]
CY  - Bellingham, Wash.
PB  - SPIE Press
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
N1  - Includes bibliographical references and index
ER  -