TY  - BOOK
AU  - Williams,Ralph E.
TI  - Modern GaAs processing methods
T2  - The Artech House microwave library
SN  - 0890063435
AV  - TK7871.15.G3 W56 1990
PY  - 1990///]
CY  - Boston
PB  - Artech House
KW  - Gallium arsenide semiconductors
N1  - Includes bibliographical references and index; Table Of Contents:Preface; Acknowledgements; Part I Preliminary Concepts; Part II General Process Techniques; Part III Specific Process Steps; Part IV Characterization and Measurement; Appendix I Manufacturing Disciplines; Index; The Author
ER  -