000 00935camIa2200313 i 4500
001 EK152
005 20251203120328.0
006 m d
007 cr aa aaaaa
008 s o eng
020 _a0585470979
035 _a(OCoLC)
040 _aBAUN
_beng
_cBAUN
_erda
041 0 _aeng
049 _aBAUN_MERKEZ
050 0 4 _aTA418.9.T45
_bO47 2002
100 1 _aOhring, Milton,
_9101481
_d1936-
_eaut
245 1 0 _aMaterials science of thin film deposition and structure
_cMilton Ohring
250 _a2.ed.
264 _aSan Diego:
_bAcademic,
_c2002.
300 _a1 online resource (794 pages)
336 _2rdacontent
_atext
_btxt
337 _2rdamedia
_acomputer
_bc
338 _2rdacarrier
_aonline resource
_bnc
347 _adata file
_2rda
650 0 _aThin films
_970377
856 _uhttp://www.netlibrary.com/urlapi.asp?action=summary&v=1&bookid=92177
942 _2lcc
_cEKT
999 _c12329
_d12329