000			01448 am a2200313 i 4500
001			15067
005			20260106102930.0
008			000616s2004 ne a bf 001 0 eng
020			_a044450558X
035			_a(OCoLC)
040			_aBAUN _beng _cBAUN _erda
041	0		_aeng
049			_aBAUN_MERKEZ
050	0	4	_aTJ223.T75 _bB36 2004
100	1		_aBao, Min-Hang _982809 _eaut
245	1	0	_aMicro mechanical transducers : _bpressure sensors, accelerometers, and gyroscopes / _cMin-Hang Bao.
264		1	_aAmsterdam: _bElsevier, _c2004.
300			_axiv, 378 pages : _billustrations ; _c25 cm.
336			_2rdacontent _atext _btxt
337			_2rdamedia _aunmediated _bn
338			_2rdacarrier _avolume _bnc
490	0		_aHandbook of Sensor and Actuators ; _v8
504			_aIncludes bibliographical references and index.
505	0	0	_tContents _tPreface _tContents _tCh. 1 Introduction to micro mechanical transducers _tCh. 2 Basic mechanics of beam and diaphragm structures _tCh. 3 Air damping _tCh. 4 Electrostatic driving and capacitive sensing _tCh. 5 Piezoresistive sensing _tCh. 6 Piezoresistive pressure transducers _tCh. 7 Piezoresistive accelerometers _tCh. 8 Capacitive pressure transducers and accelerometers _tCh. 9 Resonant senors and vibratory gyroscopes _tSubject index
650		0	_aTransducers _vHandbooks, manuals, etc.
650		0	_aMicroelectromechanical systems _vHandbooks, manuals, etc.
900			_bsatın
942			_2lcc _cKT
999			_c12860 _d12860