| 000 | 00997cam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | 41490 | ||
| 005 | 20240114201329.0 | ||
| 008 | 100713s2010 waua b 001 0 eng | ||
| 010 | _a2010026775 | ||
| 020 |
_a9780819483249 _qhbk. |
||
| 035 | _a(OCoLC) | ||
| 040 |
_aDLC _beng _cDLC _dDLC _dBAUN _erda |
||
| 049 | _aBAUN_MERKEZ | ||
| 050 | 0 | 0 |
_aTK7874 _b.L397 2010 |
| 082 | 0 | 0 | _222 |
| 100 | 1 | _aLevinson, Harry J. | |
| 245 | 1 | 0 |
_aPrinciples of lithography / _cHarry J. Levinson. |
| 250 | _a3rd ed. | ||
| 264 | 1 |
_aBellingham, Wash. : _bSPIE Press, _c[2010] |
|
| 264 | 4 | _c©2010. | |
| 300 |
_axiv, 503 pages : _billustrations (some color) ; _c26 cm. |
||
| 336 |
_2rdacontent _atext _btxt |
||
| 337 |
_2rdamedia _aunmediated _bn |
||
| 338 |
_2rdacarrier _avolume _bnc |
||
| 490 | 0 |
_aPress monograph ; _v198 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 | _aMicrolithography. | |
| 942 |
_2lcc _cKT |
||
| 999 |
_c38690 _d38690 |
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