000 01116nam a2200301 i 4500
001 6558
005 20250325120139.0
008 900411s1990 maua b 001 0 eng
010 _a90001253
020 _a0890063435
035 _a(OCoLC)
040 _cBAUN
_aBAUN
_beng
_erda
041 0 _aeng
049 _aBAUN_MERKEZ
050 0 4 _aTK7871.15.G3
_bW56 1990
082 0 0 _220
100 1 _aWilliams, Ralph E.
_eaut
245 1 0 _aModern GaAs processing methods /
_cRalph Williams.
264 1 _aBoston :
_bArtech House,
_c[1990]
264 4 _c©1990
300 _axv, 437 pages :
_billustrations ;
_c24 cm.
490 1 _aThe Artech House microwave library
504 _aIncludes bibliographical references and index.
505 0 0 _tTable Of Contents:Preface
_tAcknowledgements
_tPart I Preliminary Concepts
_tPart II General Process Techniques
_tPart III Specific Process Steps
_tPart IV Characterization and Measurement
_tAppendix I Manufacturing Disciplines
_tIndex
_tThe Author
650 0 _aGallium arsenide semiconductors.
830 0 _946826
_aArtech House microwave library.
942 _2lcc
_cKT
999 _c5391
_d5391